| 摘要 |
PROBLEM TO BE SOLVED: To perform stable, high-precision transfer control of a transfer body over a wide frequency band by calculating a 1st feedback voltage with increased counter electromotive force of an actuator and setting the driving voltage of the actuator according to the difference voltage between the 1st feedback voltage and a reference voltage. SOLUTION: An impedance multiplying circuit 42 multiplies a coil current I by resistance R1 and impedance sL and adds the products to output a voltage V1=I(R1+sL). A subtracter 31 calculates the difference between the terminal voltage V=(R+sL)I+e across the actuator 3 and the voltage V1 and outputs a voltage V2=(R-R1)I+e. A converting circuit 43 outputs a voltage Vs=(R+ sL)(I+e/(R-RI)) and compares it wit the terminal voltage V, and the electromotive force (e) is multiplied by (R+sL)/(R-RI). A substracter 36 calculates the error signal between a reference voltage Vr and the voltage Vs and a substracter 39 operates the difference value from the reference voltage Vr as the terminal voltage V across the actuator 3.
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