| 摘要 |
PROBLEM TO BE SOLVED: To provide a portable measuring device capable of measuring, easily and accurately, both the whole surface shape and a surface fine shape with a single device in the state where a lapping surface plate is loaded on a lapping machine, and to provide a device for controlling easily the surface state of the lapping surface plate or the like, and to realize a device for controlling machining precision of the surface machining device of the lapping surface plate. SOLUTION: This portable measuring device has an R-axis comprising a guide rail 1 and a table 4 engaged with the guide rail 1 movably to right and left, and a Z-axis engaged with the table 4 movably vertically. In this case, a noncontact sensor is installed on the lower end of the Z-axis, and the Z-axis moves on a plane measuring object including a curved surface at a distance. Also, a data analysis function is provided relative to surface shape data of the measuring object obtained by the portable measuring device.
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