HOLOGRAM PLATE FOR ELECTRON BEAM HOLOGRAPHY AND PATTERN FORMING METHOD BY ELECTRON BEAM HOLOGRAPHY

摘要

PROBLEM TO BE SOLVED: To provide a hologram plate which is capable of erasing zero order light at the time of pattern formation by electron beam holography. SOLUTION: A hologram plate 102 is provided with pixels 107a and 108a corresponding to the positive values and negative values of the real number parts of a complex transmission function. The pixels 107a are held by two branch electrodes 103aa and or two branch electrodes 104aa and the pixels 108a are held by branch electrodes 103aa and branch electrodes 104aa. The zero order light is erased by applying a prescribed potential difference between the electrodes 103a and the electrodes 104b.