发明名称 CERAMIC HEATER
摘要 The invention provides a ceramic heater that makes the temperature of a ceramic substrate uniform by suppressing the transfer of heat from the ceramic heater to a housing. The ceramic heater includes a heater formed on or under the surface of a ceramic substrate, and the surface roughness on the side of the ceramic substrate is JIS B 0601 Rmax=0.1-200 mu m.
申请公布号 WO0111923(A1) 申请公布日期 2001.02.15
申请号 WO2000JP05156 申请日期 2000.08.01
申请人 IBIDEN CO., LTD.;ITO, YASUTAKA;HIRAMATSU, YASUJI 发明人 ITO, YASUTAKA;HIRAMATSU, YASUJI
分类号 H05B3/20;H01L21/00;H01L21/027;H05B3/10;H05B3/14;H05B3/16;H05B3/26;H05B3/28;H05B3/68;H05B3/74;(IPC1-7):H05B3/20;H05B3/56;H01L21/30 主分类号 H05B3/20
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