发明名称 SPUTTERING PROCESS
摘要 <p>A method for coating substrates having sides of the substrate with unequal adhesion properties includes the steps of non-symmetrically coating the substrate by coating a first side under a first set of coating conditions and coating a second side under a second set of operating conditions wherein the operating conditions used to coat each side are varied so as to compensate for the unequal adhesion properties of the sides. Also, a method for substrate preparation comprising the steps of: providing an annealed thermoplastic substrate base layer having a first surface and a second surface; stabilizing the substrate base layer in an environment having a baseline temperature and relative humidity; drilling vias in the base layer; subjecting the first and second surfaces of the base layer to ion processing so as to remove contaminants caused by drilling the vias and to prepare the first and second surfaces for sputtering; metalizing the base layer by first sputtering at least one metal layer onto the first surface of the base layer and subsequently sputtering at least one metal layer onto the second surface of the base layer said sputtering of the metal layers being controlled so as to prevent the temperature of the base layer from exceeding the annealing temperature of the base layer; allowing the metalized base layer to stabilize in an environment having the baseline temperature and relative humidity an then subjecting the metalized base layer to further processing so as to modify the metal layers into conductive patterns.</p>
申请公布号 WO2001011676(A2) 申请公布日期 2001.02.15
申请号 US2000021447 申请日期 2000.08.04
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