| 摘要 |
PURPOSE: An integrated structure of an optical waveguide is provided to increase the coupling property, to reduce the length of the taper region, and to simplify the production process by effectively integrating a passive optical waveguide and an active optical waveguide. CONSTITUTION: An integrated structure of an optical waveguide consists of a passive optical waveguide(21) with no absorption and gain, an active optical waveguide(22) with gain, and a side abutment area(23). The side abutment area is located between the passive optical waveguide and the active optical waveguide. An InGaAsP layer is formed on an InP substrate. The InGaAsP layer except the area of the active optical waveguide is etched. An InGaAsP laye is formed on the etched area of the InP substrate. The passive optical waveguide is formed on the InGaAsP layer. The passive optical waveguide is formed in a narrow taper shape using a sine-curve optical waveguide mask, and the active optical waveguide is formed in a wide taper shape using the sine-curve optical waveguide mask. In this way, it is possible to effectively integrate the passive optical waveguide and the active optical waveguide. Also, since the two optical waveguides are integrated using the side abutment area, it is possible to prevent the coupling loss and the reflection loss.
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