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发明名称
Herstellungsmethode für ein supraleitendes Bauelement
摘要
申请公布号
DE3856452(D1)
申请公布日期
2001.02.15
申请号
DE19883856452
申请日期
1988.02.25
申请人
HITACHI, LTD.
发明人
NISHINO, TOSHIKAZU;KAWABE, USHIO;TARUTANI, YOSHINOBU;KOMINAMI, SHINYA;AIDA, TOSHIYUKI;FUKAZAWA, TOKUUMI;HATANO, MUTSUKO
分类号
H01L39/22;C01G1/00;C01G3/00;C23C14/08;C30B29/22;H01B12/00;H01L39/24;(IPC1-7):H01L39/24
主分类号
H01L39/22
代理机构
代理人
主权项
地址
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