METHOD FOR MANUFACTURING ACTUATOR OF INK-JET PRINTER HEAD

摘要

PURPOSE: A method for manufacturing an actuator of an ink-jet printer head is provided to smoothly perform a print work by thermal expansion action of a shape memory alloy and transformation by shape memory action regardless of residual compression stress. CONSTITUTION: A method for manufacturing an actuator of an ink-jet printer includes the steps of evaporating a second thin film(12) on a substrate(30), forming a vibrating plate(10) by evaporating a thin film shape memory alloy on the second thin film, wherein the thin film is shape memorized to maintain the flat state in the room temperature and to be bently transformed by thermal expansion when being heated by the austenite starting temperature, and to return to the flat state at the austenite ending temperature, partially exposing the second thin film of the vibrating plate by etching the part of the substrate, having a heating element(40) to be contacted with at least both end parts of the thin film shape memory alloy.