ACTUATOR FOR INK-JET PRINTER HEAD USING SHAPE-MEMORY ALLOY

摘要

PURPOSE: An actuator for an ink-jet printer head using an insulating film and a shape-memory alloy is provided to minimize the fatigue phenomenon of the actuator due to repeated use, thereby preventing the degradation of the print state. CONSTITUTION: An actuator for an ink-jet printer head using a shape-memory alloy includes a lower space part, a silicon substrate(20) forming the lower space part, an insulating film(22) formed in the surface of the silicon substrate by being made with a silicon nitride film pulling a thin film of the shape-memory alloy in the opposite direction to a direction of a nozzle, a shape-memory alloy layer(24) formed in the top of the insulating film to cover the low space part, so that the direction and the size of the initial transformation are controlled.