ALIGNMENT MARK AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To form a colored layer pattern with good accuracy of position while utilizing materials used in step for forming colored layers when the colored layers are formed on the thin film transistor side of an active matrix substrate, to produce an alignment mark capable of enhancing open area ratio and yield and to produce an active matrix substrate using the alignment mark. SOLUTION: This alignment mark 23b is formed in the formation of a source- drain electrode constituting TFT and a red filter 13a' is thickly disposed on the alignment mark 23b. Each colored layers formed later is made thin on the red filter 13a' and the alignment mark 23b is accurately detected through exposure alignment laser in an exposure step.