| 摘要 |
PROBLEM TO BE SOLVED: To obtain a positive type radiation sensitive resin composition which does not impair its performances such as sensitivity and focal depth even when a minute design rule such as super-resolution technique is applied. SOLUTION: The positive type radiation sensitive resin composition contains (A) a resin obtained by protecting at least a part of the phenolic hydroxyl groups of an alkali-soluble polymer with acid decomposable protective groups and (B) a radiation sensitive compound which generates an acid under the action of radiation. The molar extinction coefficient of the resin A at 248 nm wavelength is 500-2,000 and that of the radiation sensitive compound B at 248 nm wavelength is 10,000-30,000. |
