THERMAL AIR FLOW SENSOR AND INTERNAL COMBUSTION ENGINE CONTROL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a thermal air flow sensor having high measuring precision at a low cost. SOLUTION: This sensor comprises a heating resistor 4 arranged on the cavity part 9 of an electric insulating film 8a substantially linearly to the direction (y-direction) orthogonal to the flow of air and at least a pair of temperature measuring resistors 6 at an interval in the upstream and downstream direction of the heating resistor 4. The heating resistor 4 and the temperature measuring resistors 6 are formed symmetrically (two-rotating symmetrically) in the flowing direction of air (x-direction) and in the orthogonal direction (y-direction), and slits 5 are provided near both ends of the heating resistor 4. According to this, the temperature distribution can be improved, and the measuring precision can be improved at a low cost.