REDUCED DIFFUSION OF A MOBILE ION FROM A METAL OXIDE CERAMIC INTO THE SUBSTRATE
摘要
A scavenger layer is provided to prevent the diffusion of an excess mobile specie form a metal oxide ceramic such as strontium bismuth tantalate (SBT) into unwanted parts of a device. The scavenger layer such as Ti or a transition metal on an oxide thereof is provided above the metal oxide ceramic. As the excess mobile specie diffuses out of the metal oxide ceramic, it migrates toward the scavenger layer and reacts with it. The reaction consumes the excess mobile specie.
申请公布号
WO0038238(A8)
申请公布日期
2001.02.15
申请号
WO1999US29815
申请日期
1999.12.16
申请人
INFINEON TECHNOLOGIES AG;ADVANCED TECHNOLOGY MATERIALS, INC.