ROLLER STRUCTURE FOR ALIGNING WAFERS

摘要

PURPOSE: A roller structrue for aligning wafers is to inhibit the production of particles due to a breakdown of components for aligning the wafers or a breakdown of the wafers. CONSTITUTION: An aligning roller comprises a supporting shaft(51) having a ring-typed groove(511), a ring member(52) inserted into the groove of the supporting shaft, and a guide roller contacted with a flat zone of the wafer to stop the rotation of the wafer . The grooves of the supporting shaft are arranged along a longitudinal direction of the supporting shaft. The ring member each inserted into the groove of the supporting shaft contacts with a corresponding wafer. When the supporting shaft rotates, since the ring member rotates the wafer contacted with the ring member, the ring member is made of a resilient material. The guide roller is made of a resilient material to damp the shock produced when contacting with the wafer