IMPROVED CONNECTORS FOR AN ELECTROSTATIC CHUCK

摘要

Apparatus for connecting a first component to a second component in that the first component has a first connecting member attached thereto, the second component has a second connecting member attached thereto and either of the first or second connecting members is provided with a relief. The apparatus is a connector, the first component is a power supply and the second component is an electrostatic chuck. The first connecting member has a bore provided on a top end. The second connecting member has a threaded opening for receiving the first connecting member. Alternately, the second connecting member is provided with a groove disposed radially outward of the threaded opening. The connecting members provided with the reliefs accommodate and withstand the forces exerted thereupon caused by thermal expansion during semiconductor wafer processing.