| 摘要 |
<p>The invention provides a ceramic heater capable of making uniform the temperature of a workpiece such as a silicon wafer, preventing damage to the silicon wafer, and recovering a set temperature in a short time if an unexpected temperature change occurs. The ceramic heater includes a heater formed on or under the surface of a ceramic substrate, temperature-measuring means for measuring the temperature of the ceramic substrate or an object to be heated, a controller for supplying electric power to the heater, a storage for storing the temperature data measured by the temperature-measuring means, and a processor for determining the electric power required for the heater based on the temperature data. The heater is divided into two or more circuits, which are supplied with different quantities of electric power.</p> |
