OPTICAL DEVICE FOR ILLUMINATION, EXPOSURE DEVICE, CONTAINER OF OPTICAL PART, METHOD OF ASSEMBLING EXPOSURE DEVICE, METHOD OF EVALUATING MATERIAL, AND METHOD AND DEVICE FOR EVALUATING FILTER

摘要

An optical device for illumination includes a first space (SP1) surrounding an optical path of an energy beam for irradiating an object, a second space (SP2) surrounding the first space (SP1), and a third space (SP3) surrounding the second space (SP2). The first to third spaces (SP1, SP2, SP3) are controlled to have different target doping concentrations. A source of contamination such as an actuator can thus be isolated to maintain the space surrounding the optical path chemically clean.