DIELECTRIC BARRIER DISCHARGE LAMP APPARATUS

摘要

A dielectric barrier discharge lamp apparatus comprises dielectric barrier discharge lamps including a discharge plasma space filled with discharge gas that can produce excimers by dielectric barrier discharge. A dielectric lies between at least one of the discharge electrodes and the discharge gases. The dielectric barrier discharge lamp apparatus also comprises power supply means for applying high voltage to the electrodes. The power supply means is divided into front and back stages, and the back stages are corresponding to the lamps, respectively. The front stage of the power supply means supplies a common DC voltage to the back stages, and each of the back stage converts the DC voltage into a high AC voltage using switching elements and a booster transformer and applies it between the electrodes. Each of the back stages can independently adjust the frequency of the high AC voltage, and the front stage can adjust the common DC supply voltage.