发明名称 APPARATUS AND METHODS FOR THE INSPECTION OF OBJECTS
摘要 This invention discloses a system and method for inspecting objects, the method includes creating a reference image for a representative object, the reference image comprising an at least partially vectorized first representation of boundaries within the image, acquiring an image of an object under inspection comprising a second representation of boundaries within the image, and comparing the second representation of boundaries to said at least partially vectorized first representation of boundaries, thereby to identify defects. A method and system for image processing in a software environment, the method including providing to a software based image processor a combination of user defined regions and defect triggers received from a hardware processor, and inspecting each of the user defined regions and regions surrounding hardware defect triggers each with a dynamically chosen set of inspection algorithms is also disclosed.
申请公布号 WO0111565(A2) 申请公布日期 2001.02.15
申请号 WO2000IL00468 申请日期 2000.08.03
申请人 ORBOTECH, LTD.;DUVDEVANI, SHARON;GILAT-BERNSHTEIN, TALLY;KLINGBELL, EYAL;MAYO, MEIR;RIPPA, SHMUEL;SMILANSKY, ZEEV 发明人 DUVDEVANI, SHARON;GILAT-BERNSHTEIN, TALLY;KLINGBELL, EYAL;MAYO, MEIR;RIPPA, SHMUEL;SMILANSKY, ZEEV
分类号 G01B11/30;G01N21/956;G06T1/00;G06T7/00;(IPC1-7):G06T5/00 主分类号 G01B11/30
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