METHOD OF MANUFACTURING SINGLE CRYSTAL SEMICONDUCTOR SHEET AND METHOD OF MANUFACTURING SPECIAL SUBSTRATE

摘要

PURPOSE: A method of manufacturing a single crystal semiconductor sheet and a method of manufacturing a special substrate using the same are to manufacture the semiconductor sheet having the single crystal instead of a wafer, therefor obtaining a high operating speed and a high power. CONSTITUTION: A method of manufacturing a single crystal semiconductor sheet comprises the steps of: forming a base layer by doping a soluble material on an upper portion of a support(210); forming an amorphous semiconductor film(230) on the upper portion of the base layer; attaching a single crystal semiconductor seed to one side of the amorphous semiconductor film; removing the base layer using a solvent of the soluble material; and converting the amorphous semiconductor film into the single crystal semiconductor by illuminating in turn a connecting portion of the single crystal semiconductor to the amorphous semiconductor with a laser device(260).