发明名称 Actuator and transducer
摘要 An actuator comprises a magnet yoke (10a, 10b) and a carrier member (20) movable relative to the magnet yoke. The magnet yoke (10a, 10b) has at least one permanent magnet (14) and the carrier member (20) is positioned in the magnetic field produced by this magnet. The carrier member (20) has an auxiliary magnetic member (28) that produces a relative bias force between the carrier member (20) and the magnet yoke (10a, 10b). The bias force can be used to compensate for a weight applied to the device, such that it acts as a bearing with a very large compliance. The carrier member (20) also comprises a coil (26). Passing current through the coil (26) produces a Lorentz force which can be used for further control of the actuator; alternatively, the device can be used as a velocity transducer by sensing the EMF generated in the coil by relative motion of the carrier member (20) and magnet yoke (10a, 10b). <IMAGE>
申请公布号 EP1001512(A3) 申请公布日期 2001.02.14
申请号 EP19990308852 申请日期 1999.11.08
申请人 ASM LITHOGRAPHY B.V. 发明人 LOOPSTRA, ERIK ROELOF
分类号 G03F7/20;H02K41/035 主分类号 G03F7/20
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