| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a leveled film of a superfine particle material which enables formation of a film in which superfine particle material is sufficiently bonded, whose structure is dense, and which has a smooth surface and an even density. SOLUTION: In a superfine particle material-based film formation method for forming a film 2 of an ultrafine particle material 7 from a deposited material of the superfine particle material formed by supplying the superfine particle material to the substrate 3, the film is formed by carrying out a leveling process one or more times to level the surface of the deposited material 2a of the superfine particle material supplied to the substrate.
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