摘要 |
The present laser/detector hybrid with a turning mirror integrated into the photo detector chip. This allows a smaller package for the device and a simpler method for producing the laser/detector device. The laser beam is emitted along the surface of the chip towards a groove cut in the chip. A mirror is mounted in the groove, and the mirror has a corrugated structure so that it will reflect the beam and convert it into multiple beams at the same time.
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