SHEET-FED RINSING BY LIQUID CHEMICAL AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To efficiently rinse a subject to be rinsed by a liquid chemical uniformly in the whole area while reducing the amount of the liquid chemical to be used per one sheet of the subject. SOLUTION: The plate-shaped subject 1 to be rinsed is set in a subject holding means 13a used for horizontally setting the subject 1 and the outer periphery of the set subject 1 is surrounded with a liquid chemical holding means 16. The set subject 1 is immersed in the liquid chemical by supplying the liquid chemical through the means 16 when rinsed and when the rinsing is finished, the used liquid chemical is discharged through the means 13a.