MICROPRESSURE PUSH CYLINDER

摘要

PROBLEM TO BE SOLVED: To generate minute thrust in a micropressure push cylinder by utilizing single bellows. SOLUTION: An air bearing 16 is arranged on a front inner peripheral surface of a cylinder body 11 of an air cylinder 10. A rod member 21 inserted through an inner peripheral surface 16A of the air bearing 16 is supported by the air bearing 16 in a non-contact manner. An end cover 23 is connected to a rear end of the cylinder body 11, while bellows 27 are connected across the rear end of the rod member 21 and the end cover 23 in an airtight manner. Compressed air is introduced into an interior of the bellows 27 through a supply/ discharge port formed on the end cover 23. A front end of the rod member 21 is projected to the front of the cylinder body 11.