发明名称 SINTERED BODY, SPUTTERING TARGET AND ITS PRODUCTION
摘要 PROBLEM TO BE SOLVED: To obtain a sintered body having high sintering density, mechanical strength and resistance to heat shock by further incorporating a double oxide of zinc and silicon into a sintered body containing, as main components, zinc sulfide and silicon dioxide. SOLUTION: It is preferable that the sintered body containing, as main components, zinc sulfide and silicon dioxide satisfies at least either one of the condition that the three-point bending strength, based on the JIS R1601, of the sintered body is >=60 MPa or the condition that the thermal conductivity, based on the JIS R1611, of the sintered body is >=9.8 W/m.K. The sintered body containing, as main components, zinc sulfide and silicon dioxide is obtained by sintering a powder mixture prepared by mixing zinc sulfide powder, silicon dioxide powder and zinc oxide powder. In the sintered body containing zinc sulfide, silicon dioxide and a double oxide of zinc and silicon, the double oxide is preferably zinc orthosilicate, Zn2SiO4, having peaks at least at 3.49, 2,84 and 2.64 in an X-ray diffraction spectrum.
申请公布号 JP2001039771(A) 申请公布日期 2001.02.13
申请号 JP19990286738 申请日期 1999.10.07
申请人 TOSOH CORP 发明人 MOCHIZUKI OSAMU;KUROSAWA SATOSHI;TAKAHATA TSUTOMU
分类号 C04B35/547;C23C14/34 主分类号 C04B35/547
代理机构 代理人
主权项
地址