| 摘要 |
A treating device, wherein a first heating chamber (11) having an exhaust system and a second heating chamber (13) are connected in parallel with a first purge chamber (12) capable of gaining access to the outside, whereby the number of air-tight doors and insulated doors can be reduced to below those of a conventional treating device, and the reliability of sealing of the air-tight doors can be increased and, in addition, general-purpose treatings such as a vacuum evaporation collecting and metal heat treatment can be performed simultaneously in parallel with each other. |
