| 摘要 |
PROBLEM TO BE SOLVED: To prevent intrusion of refuse by storing and conveying a case storing thin-plate-like products such as wafers in a container, and sealing a gap between a container and each door of a clean room with a sealing mechanism when the case is delivered between this container and the clean room. SOLUTION: A case storing thin-plate-like products is stored in a container 130 moving out of a clean room 110 and is transferred, and the case is delivered between this container 130 and the inside of the clean room 110. For perfectly performing this delivery under a clean condition, a sealing mechanism 150 is provided which seals a clearance between the container 130 and the clean room 110 over the entire outer periphery of both doors when the door 131 of the container 130 approaches to the door 111 for handling with the clean room so as to substantially overlap with it. A sealing mechanism 155 for sealing a gap between both doors is provided over the entire outer periphery of both doors. When the case is delivered, both doors are simultaneously opened in an integral state. |
