METHOD FOR MAKING OPTICAL WAVEGUIDE DEVICE

摘要

PURPOSE: A method is provided to reduce a fabrication process of an optical waveguide device using a hardened optical polymer when irradiating ultraviolet rays, and to reduce a process time without using a specific vacuum equipment. CONSTITUTION: A lower clad layer(102) is on a substrate(100) made of a transparent glass material, and a metal layer(104) is formed on the lower clad layer(102). In order to form a waveguide core(114), an optical polymer layer is formed on the metal layer(104) by coating an optical polymer hardened by ultraviolet rays. Ultraviolet rays are irradiated on a lower surface of the substrate(100) on which the optical polymer layer is formed, so that a part of the optical polymer, where "W" of the metal layer is formed, is hardened. The metal layer serving as a mask is etched. An upper clad layer is formed on the lower clad layer(102) where the waveguide core(114) is formed. The upper clad layer is made of a clad material of a refractive index less than that of the waveguide core(114).