| 摘要 |
PROBLEM TO BE SOLVED: To reduce the cumulative noise of the deflector of a charged particle beam projection system by respectively installing power amplifiers to a plurality of yokes, which generate signals proportional to deflection data from received common digital deflection data and control signals from the signals of programmable attenuators. SOLUTION: A common deflection signal is supplied simultaneously to individual yoke drive circuits, and then supplied to individual yokes. Digital deflection data 120 from a controller are supplied to the D/A converter 122 of a common signal source which generates a common deflect signal 120. The signal 124 is delivered to individual programmable attenuators 1261-126n. Individual signals 1281-128n having different magnitudes are respectively supplied to power amplifiers 1301-130n, which can drive the yokes. Amplified yoke control signals 1321-132n are delivered to the yokes of a curve variable axis lens. The lattice structure width of a reticle can be coped therewith.
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