LINEAR MOTOR, STAGE APPARATUS, ALIGNER AND MANUFACTURE OF DEVICE

摘要

PROBLEM TO BE SOLVED: To increase the strength of a thinned part while maintaining the thinness of the thinned part of a jacket and to raise the number of inherent oscillations of coil and jacket parts. SOLUTION: A magnet, a coil 1a and jackets 14, 14' that cover the coil 1a and the inside space of which a coolant is supplied into are provided. The jackets have members 8 of a comb shape arranged along the driving direction inside to retain the coil by sandwiching it between the teeth of the members 8.