SYSTEM, METHOD AND RECORDING MEDIUM FOR AUTOMATICALLY MANAGING SEMICONDUCTOR PRODUCTION BAY

摘要

PROBLEM TO BE SOLVED: To provide a system and a method for efficiently managing a semiconductor production bay by classifying a storage means and data in the management of the semiconductor production bay, and to provide a recording medium for realizing them. SOLUTION: In this system, there are included many process equipment 700 for processing lots and generating real-time process data associated with the process in response to the lot data, at least one production managing means 620 for generating a control instruction associated with the process from a semiconductor production bay and receiving real-time process data from each process equipment, an equipment control means 640 for controlling the process equipment and transmitting the real-time process data to the production managing means, data storage means 160 for storing data associated with the process and a robot in the semiconductor production bay, and a history managing means 400 for managing the history of the process equipment and of each wafer.