发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR SUBSTRATE, ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor device and a semiconductor device capable of preventing an increase in packaging area, and a semiconductor substrate and an electronic device. SOLUTION: A trench 16 is formed, by etching, on the surface of a substrate 12 for connection. After the trench 16 is formed, a metal wiring 18 is formed on the surface such that it crosses the trench 16 and a terminal 20 is formed on the surface of the wiring 18 and then a semiconductor chip 14 having on the side a pad 22 for connection electrically connected to the terminal 20 is mounted on the trench 16. I f the semiconductor device 10 is constituted in this manner, the semiconductor chip 14 is erected on the surface of the substrate 12 for connection and hence the packaging area of the semiconductor chip 14 is as large as the area of the side of the semiconductor chip 14. Therefore, more semiconductor chips can be mounted in the same area on the substrate.
申请公布号 JP2001035992(A) 申请公布日期 2001.02.09
申请号 JP19990207908 申请日期 1999.07.22
申请人 SEIKO EPSON CORP 发明人 SATO HIDEKAZU;TSUZUKI MASAJI
分类号 H01L25/18;H01L25/04;(IPC1-7):H01L25/04 主分类号 H01L25/18
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