| 摘要 |
PROBLEM TO BE SOLVED: To reduce noise by providing an interlayer dielectric, an interconnection layer and a dummy pattern which planarizes the interlayer dielectric and shields the interconnection layer. SOLUTION: First and second dummy patterns 1, 2 are formed in a region having no interconnection for the purpose of planarization. An Al interconnection 3 is interposed between the first and second dummy patterns 1, 2. More specifically, the first dummy pattern 1 is located on the left side of the Al interconnection 3 and the second dummy pattern 2 is located on the right side thereof. Potential of the first and second dummy patterns 1, 2 is fixed at the power supply voltage by connecting them with the power supply. The dummy patterns 1, 2 having a fixed potential exhibit the effect of shield wire and reduces noise on the actual interconnection, i.e. the Al interconnection 3, surrounded by the dummy patterns 1, 2.
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