| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized X-ray generating device at a low cost, capable of producing a small focus of X-rays. SOLUTION: An X-ray generating device is structured so that three metal targets 4 having different characteristic X-rays such as copper, tungsten, and molybdenum are provided on a base 5 at a certain spacing linearly while they are patterned in micro-sizes, and the base 5 is attached to a tube body 1 through a guide rail 8 and an 0-ring 9 for seal in such a way as movable in the target laid direction in line. To the base 5, a motor 11 is coupled capable of rotating both in the regular and reverse directions through a rack-the-pinion mechanism 10, and it is arranged so that the metal target 4 to be irradiated with electron beam from an electron source 2 can be changed by moving the base 5 directly.
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