| 摘要 |
PROBLEM TO BE SOLVED: To provide a silver-containing superfine particle dispersed solution having low electric resistance at an LSI operating temperature capable of forming a conductive uniform fine pattern by mixing an organic solvent which hardly evaporates at room temperature but evaporates in silver wiring with silver-containing superfine particles having a specified particle size or less, covering the surfaces of the superfine particles with the organic solvent to independently disperse the superfine particles. SOLUTION: A silver-containing fine particle has a particle size of 0.01μm or smaller and a viscosity at room temperature of 50 cp or lower. As the organic solvent, which preferably evaporates at 150 deg.C or higher, mineral split, tridecane, dodecylbenzne, mixtures thereof, or their mixtures withα-terpineol is preferably used. Furthermore, hydrocarbon having 5 or more carbon atoms, alcohol, ether, ester, ketone, organic nitride, organic silicon compound, organic sulfur compound or a mixture thereof can be properly mixed. The silver- containing ultrafine particle is desirably formed of silver, silver oxide or a mixture thereof, and the concentration is desirably set to 15-50 wt.%.
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