| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the limitation of the shape, bore and length of a discharge chamber by installing an antenna itself for plasma generation purpose in a vacuum container and to stably generate large-size, large-volume and high- density plasma by coating all surface of an antenna conductor with an insulator. SOLUTION: A whole antenna conductor 5 is put in a vacuum container 1 for a plasma generator, eliminating the need for a barrier rib and a top plate of an insulator to permit the effective use of all induced field emitted from an antenna. The inductance of the antenna is made smaller or the antenna conductor 5 is coated with an insulator, whereby abnormal discharge is restricted, resulting in stable high-density plasma. |
