| 摘要 |
PROBLEM TO BE SOLVED: To attain development with an aqueous alkali solution by using a specifieda polyimide precursor and a specified vinyloxy-containing compound. SOLUTION: The photosensitive resin composition comprises a polyimide precursor of formula I, a vinyloxy-containing compound of formula II, a sensitizer which is degraded under active light such as UV to generate an acid and a solvent. In the formula I, R1 is a tetravalent aromatic group, a tetravalent organic group formed by the single bonding of plural aromatic rings or the like, R2 is a divalent aromatic group, a divalent organic group formed by the single bonding of plural aromatic rings or the like and (n) is an integer of >=1. In the formula II, R3 is a di- or trivalent aliphatic group, an aromatic group or the like and (n) and (m) are each an integer of 1-3. The solvent for the polycondensation reaction of an acid component having an R1 skeleton and a diamine component having an R2 skeleton in the polyimide precursor may be N-methylpyrrolidone. |
