| 摘要 |
<p>PROBLEM TO BE SOLVED: To acquire information on the interfaces of membranes constituted by laminating ultra-thin membranes, to perform easy mounting to a manufacturing device and film forming device, and to analyze and evaluate the interface parts of the membranes at the site. SOLUTION: In an ultra-thin membrane interface evaluating device 1, an ion source 8 and a coaxial-type detector 94 are coaxially arranged. The ion source 8 utilizes a region between the ion energy region of low-speed ion scattering and the ion energy region of intermediate-speed ion scattering as an ion energy region. The coaxial-type detector 94 detects scattering ions which scatter at angles in the vicinity of 180 deg. with respect to the direction of irradiation of ions. The interface parts of ultra-thin membranes are analyzed and evaluated from the time of flight and detected intensity of the scattering ions.</p> |
