| 摘要 |
PROBLEM TO BE SOLVED: To obtain a biaxial actuator in which the operability in the filling operation of a damper agent is made good, in which the damper agent can be filled into a gap between a step face and a board uniformly and without generating air bubbles and which can shorten the filling time of the damper agent. SOLUTION: The lens holder of an objective lens, four suspension wires 3 which hold the lens holder so as to be movable, a board 16 which fixes end parts of the respective suspension wires 13 and a fixation member 15 are arranged and installed at a baseplate. A step face is formed, via a fixation face and a U-shaped groove, on the rear part of a fixation part 15s. A second U-shaped groove 15q is formed between the step face and a base body part 15r. Two filling chambers 15i are formed on the side of the objective lens of the fixation part 15s. Two positioning holes 15f are formed in the bottom part 15k of the filling chambers 15i. A damper-agent inflow hole 15g is formed in the intermediate part of the two positioning holes 15f. The board 16 is attached and fixed. A gap 21 is formed between the board 16 and the step face. A damper agent 22 is filled into the filling chambers 15i. The damper agent 22 is filled into the gap 71 through the damper-agent inflow hole 15g.
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