| 摘要 |
PROBLEM TO BE SOLVED: To provide a polygon scanner capable of smoothly attaching/detaching a rotary polygon mirror without exerting excessive force at the time of attaching/detaching the rotary polygon mirror in order to easily and effectively reutilize it. SOLUTION: Surface treatment for enhancing hardness and imparting lubricity is applied to an inner peripheral part 10b of the rotary polygon mirror 10 directly attached to a rotary shaft, that is, the inner peripheral part 10b is coated with a ceramic coating film by vapor deposition or the like, for instance. Therefore, by preventing the inner peripheral part 10b of the mirror 10 from being deformed and damaged in the case of attaching/detaching the mirror 10, attaching accuracy at the time of reattaching the mirror 10 is enhanced and the excessive force need not be exerted at the time of detaching it, whereby lowering of the accuracy of a mirror surface 10a by unequal stress is prevented. Therefore, repeated reutilization of the mirror 10 is easily realized. |
