APPARATUS CONTROLLED BASED ON PARAMETERS, PARAMETER CONTROL DEVICE, AND PARAMETER FILE MANAGEMENT METHOD

摘要

PROBLEM TO BE SOLVED: To secure parameter file compatibility between devices, regardless of unit mounting errors in respective devices. SOLUTION: A means is provided for computing (steps 905 and 906) values of those parameters used for control in the operation of devices such as sample shot information (step 902) which is influenced by mounting errors of units of the devices on the basis of positions, corresponding to additions of the unit mounting errors to designed unit mounting positions.