| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray analyzing device extremely superior in operability and capable of performing highly accurate measurement in an extremely short time. SOLUTION: In this device, a sample 5 is placed on a sample stage 4 capable of moving a sample in two X- and Y-directions which intersect each other at right angles. The sample 5 is monitored by a camera 13 for monitoring. The image 5A of the sample 5 by the monitoring is displayed on the screen 15a of a display device 15 attached to a computer 14. By clicking on a predetermined part of the image 5A of the sample 5 with an input device 16 attached to the computer 14 at the time of measurement, the sample stage 4 is moved to move the sample 5 in such a way that its predetermined section is located at the location of X-ray irradiation. In this case, at the time of specifying a measurement part, by clicking twice on an object part of measurement of the sample image 5A displayed on the screen 15a of the display device 15, a correction coefficient is obtained on the basis of the coordinate location of the sample image 5A at the time of the clicks.</p> |
