| 摘要 |
PROBLEM TO BE SOLVED: To replace a body to be inspected in a vacuum chamber with another body to be inspected while deciding a leak without being affected by tracer gas from other bodies to be inspected. SOLUTION: This leak testing method has a storage stage for putting a body X to be inspected which is filled with tracer gas in the vacuum chamber 10, an evacuation stage for evacuating the vacuum chamber 10 by a vacuum pump 20, a communication stage for cutting off the communication between a partition chamber 30 formed between the vacuum chamber 10 and vacuum pump 20 and the vacuum pump 20 when the inside of the vacuum chamber 20 reaches a previously set specific degree of vacuum and links the partition chamber 30 with a gas detector 40 to make the tracer gas leaking from the body X to be inspected with the gas detector 40, a cutoff stage for disconnecting the vacuum chamber 10 from the partition chamber 30, and an exchange stage for linking the inside of the vacuum chamber 10 to the atmosphere and replacing the body X to be inspected with another body to be inspected.
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