LOAD LOCK APPARATUS AND WAFER CARRYING SYSTEM

摘要

PROBLEM TO BE SOLVED: To feed a wafer in a quickly and accurately aligned condition to a wafer treating apparatus, without increasing the cost and installation space in a semiconductor manufacturing equipment. SOLUTION: A wafer W is mounted on a wafer mount 60 in a load-locked frame 41 in a vacuum condition, and the wafer W is regulated at a center position by guide means 63 in four directions, thereby aligning the wafer center with the rotation center of the wafer mount 60. The wafer mount 60 is rotated to rotate the wafer W until a notch 20 formed into the wafer W goes to a specified position, the read position of an optical sensor, thus adjusting the position of the wafer W.