| 摘要 |
PROBLEM TO BE SOLVED: To blow off residual gas in a short time by blowing off the gas from a panel by making an electron beam or an ultraviolet ray irradiate to the panel in an evacuated atmosphere. SOLUTION: A first panel (a cathode panel) 21 and a second panel (an anode panel) 31 are prepared, and the first panel 21 is carried in a vacuum chamber 10 by a carrying means 12A to be arranged under an electron beam source 11A. While the second panel 31 is carried in the vacuum chamber 10 by a carrying means 12B to be arranged above an electron beam source 11B. A door is closed, and a vacuum means is operated to set the inside of the vacuum chamber 10 in a vacuum state. The electron beam sources 11A, 11B are operated in a vacuum atmosphere to irradiate an electron beam to the first panel 21 and the second panel 31 to blow off gas from these panels 21, 31. The carrying means 12A, 12B are operated, the first panel 21 and the second panel 31 are heated, and are brought close to each other to be contacted in the peripheral part to perform ageing processing.
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