| 摘要 |
PROBLEM TO BE SOLVED: To provide a frequency control device, which can adjust dispersion in the frequencies of respective elements in a short time, when plural elements are formed on one piezoelectric substrate, for piezoelectric component which is suppression in mass productivity. SOLUTION: A shield plate 7 has a window 8 capable of exposing one part or all plural elements 3 formed on a piezoelectric substrate 2, and a shutter 9 opens/closes the window 8. Between the shield plate 7 and a piezoelectric resonator, an opening pattern plate 11 is provided. The combination for almost all openings corresponding to the electrodes to be exposed simultaneously from the window 8 of the shield plate 7 is formed on the opening pattern plate 11. After the frequencies of respective elements composed of the electrodes 3 formed on the piezoelectric substrate 2 are measured and the dispersion from a target frequency is measured, the pattern of a suitable opening 12 is selected from the opening pattern plate 11, corresponding to the quantity of that dispersion and the frequency of only the selected element is adjusted by having that element irradiated with ion beams through the relevant opening 12.
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