| 摘要 |
PROBLEM TO BE SOLVED: To suppress production cost and to improve producing efficiency. SOLUTION: The principle planes, on which recesses are not formed, of two piezoelectric diaphragms 1 and 2 are stuck mutually by an adhesive agent 3 and in the state of performing masking to principle planes to form recesses, so as to form prescribed recesses with metal films 10 and 20, the diaphragms are immersed in an etching liquid so that recesses can be formed. Afterwards, these two piezoelectric diaphragms 1 and 2 are separated.
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