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发明名称
Reaktionskammer mit quasi heisser Wandung
摘要
申请公布号
DE69608335(T2)
申请公布日期
2001.02.08
申请号
DE19966008335T
申请日期
1996.02.23
申请人
APPLIED MATERIALS, INC.
发明人
LINDSTROM, PAUL R.
分类号
C23C16/46;C23C16/48;H01L21/02;H01L21/205;(IPC1-7):C23C16/46;H01L21/00
主分类号
C23C16/46
代理机构
代理人
主权项
地址
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