Pressure sensor for measuring gas or liquid pressure

摘要

The pressure sensor has a housing (2) with electrical connections (23). A sensor chip is joined to the housing and has a pressure sensitive field (12), an electric evaluation circuit and electrical contacts (13). The contacts are connected to the electrical connections of the housing by means of wire bonding. The sensor chip is divided into three regions. A first outer region (111) includes the sensor field (12), and intermediate region (112) contains the electrical circuit, and a second outer region (113) contains the electrical contacts (13). The chip is joined to the housing in the second outer region. The size of the intermediate region is selected so that a force applied in the second outer region is transmitted via the mechanical join (24), and not the sensor field.